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ISO 21360-6:2023

Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 6: Cryogenic vacuum pumps

Standard Details

This document specifies methods for measuring the volume flow rate, maximum throughput, pumping capacity, base pressure cryogenic vacuum pump, cooldown time and crossover value of cryogenic vacuum pumps.

It is applicable to two-stage, closed-loop gaseous helium cryogenic vacuum pumps, which can be directly flanged to a vacuum chamber.

General Information

Status : Published
Standard Type: Main
Document No: ISO 21360-6:2023
Document Year: 2023
Pages: 12
Edition: 1

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ISO 21360-6:2023
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