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ISO 3530:1979

Vacuum technology — Mass-spectrometer-type leak-detector calibration

Standard Details

Only leak detectors are described which have an integral high vacuum system to maintain the sensing element of the mass spectrometer at a low pressure. Two procedures are outlined, one to determine the minimum detectable leak rate and the other for determination of the minimum detectable concentration ratio.

General Information

Status : Published
Standard Type: Main
Document No: ISO 3530:1979
Document Year: 1979
Pages: 10
Edition: 1

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ISO 3530:1979
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