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ISO 18115-3:2022

Surface chemical analysis — Vocabulary — Part 3: Terms used in optical interface analysis

Standard Details

This document defines terms for surface chemical analysis in the area of optical interface analysis including ellipsometry, Raman spectroscopy and nonlinear optical techniques as well as general optical terms.

General Information

Status : Published
Standard Type: Main
Document No: ISO 18115-3:2022
Document Year: 2022
Pages: 35
Edition: 1

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ISO 18115-3:2022
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