logo

Standards Manage Your Business

We Manage Your Standards

ISO

ISO 14606:2022

Surface chemical analysis — Sputter depth profiling — Optimization using layered systems as reference materials

Standard Details

This document gives guidance and requirements on the optimization of sputter-depth profiling parameters using appropriate single-layered and multilayered reference materials, in order to achieve optimum depth resolution as a function of instrument settings in Auger electron spectroscopy, X-ray photoelectron spectroscopy and secondary ion mass spectrometry.

This document is not intended to cover the use of special multilayered systems such as delta doped layers.

General Information

Status : Published
Standard Type: Main
Document No: ISO 14606:2022
Document Year: 2022
Pages: 17
Edition: 3

Life Cycle

Currently Viewing

Published
ISO 14606:2022
Knowledge Corner

Expand Your Knowledge and Unlock Your Learning Potential - Your One-Stop Source for Information!

© Copyright 2024 BSB Edge Private Limited.

Enquire now +