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ISO 11952:2014

Surface chemical analysis — Scanning-probe microscopy — Determination of geometric quantities using SPM: Calibration of measuring systems

Standard Details

ISO 11952:2014 specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes for measuring geometric quantities at the highest level. It is applicable to those providing further calibrations and is not intended for general industry use, where a lower level of calibration might be required.

General Information

Status : WITHDRAWN
Standard Type: Main
Document No: ISO 11952:2014
Document Year: 2014
Pages: 58
Edition: 1

Life Cycle

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WITHDRAWN
ISO 11952:2014
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