logo

Standards Manage Your Business

We Manage Your Standards

    Log in / Signup cart wishlist
    ISO

    ISO/TR 16268:2009

    Surface chemical analysis — Proposed procedure for certifying the retained areic dose in a working reference material produced by ion implantation

    Standard Details

    ISO/TR 16268:2009 specifies a procedure for the certification of the areic dose of an ion-implanted analyte element of atomic number larger than that of silicon retained in a working reference material (WoRM) intended for surface-analytical use. The WoRM is in the form of a polished (or similarly smooth-faced) wafer (also referred to as the host), of uniform composition and nominal diameter 50 mm or more, that has been ion-implanted with nominally one isotope of a chemical element (also referred to as the analyte), not already present in the host, to a nominal areic dose normally within the range 1016 atoms/cm2 to 1013 atoms/cm2 (i.e. the range of primary interest in semiconductor technology). The areic dose of the ion-implanted analyte retained in the WoRM wafer is certified against the areic dose of the same analyte retained in an ion-implanted silicon wafer having the status of a (preferably certified) secondary reference material (SeRM).

    Information is provided on the concept and the procedure for certification of the WoRM. There is also a description of the requirements for the reference materials, the comparative measurements and the actual certification. Supporting information on ion implantation, ion-implantation dosimetry, wavelength-dispersive X‑ray fluorescence spectroscopy and non-certified substitutes for unobtainable SeRMs is provided in four annexes. Sources and magnitudes of uncertainties arising in the certification process are detailed in a fifth annex.

    General Information

    Status : Published
    Standard Type: Main
    Document No: ISO/TR 16268:2009
    Document Year: 2009
    Pages: 19
    Edition: 1
    Preview Document

    Life Cycle

    Currently Viewing

    Published
    ISO/TR 16268:2009
    Knowledge Corner

    Expand Your Knowledge and Unlock Your Learning Potential - Your One-Stop Source for Information!

    © Copyright 2024 BSB Edge Private Limited.

    Enquire now +
    This Website Uses Cookies to Manage Services