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ISO

ISO/TR 15969:2001

Surface chemical analysis — Depth profiling — Measurement of sputtered depth

Standard Details

This Technical Report gives guidelines for measuring the sputtered depth in sputtered depth profiling. The methods

of sputtered depth measurement described in this Technical Report are applicable to techniques of surface

chemical analysis when used in combination with ion bombardment for the removal of a part of a solid sample to a

typical sputtered depth of up to severalmicrometres.

General Information

Status : WITHDRAWN
Standard Type: Main
Document No: ISO/TR 15969:2001
Document Year: 2001
Pages: 12
Edition: 1

Life Cycle

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ISO/TR 15969:2001
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