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ISO/TR 18394:2016

Surface chemical analysis — Auger electron spectroscopy — Derivation of chemical information

Standard Details

ISO/TR 18394:2016 provides guidelines for identifying chemical effects in X-ray or electron-excited Auger-electron spectra and for using these effects in chemical characterization.

General Information

Status : Published
Standard Type: Main
Document No: ISO/TR 18394:2016
Document Year: 2016
Pages: 24
Edition: 2

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ISO/TR 18394:2016
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