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ISO/TR 19319:2003

Surface chemical analysis — Auger electron spectroscopy and X-ray photoelectron spectroscopy — Determination of lateral resolution, analysis area, and sample area viewed by the analyser

Standard Details

ISO/TR 19319:2003 provides information for measuring (1) the lateral resolution, (2) the analysis area, and (3) the sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy.

General Information

Status : WITHDRAWN
Standard Type: Main
Document No: ISO/TR 19319:2003
Document Year: 2003
Pages: 17
Edition: 1

Life Cycle

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WITHDRAWN
ISO/TR 19319:2003
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