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BS EN 62047-2:2006

Semiconductor devices. Micro-electromechanical devices - Tensile testing method of thin film materials

General Information

Status : Definitive
Standard Type: Main
Document No: BS EN 62047-2:2006
Document Year: 2006
Pages: 16
  • Section Volume:
  • GBM21 Electronic Components & Devices (GMB21)

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Definitive
BS EN 62047-2:2006
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