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BS EN 62047-25:2016

Semiconductor devices. Micro-electromechanical devices - Silicon based MEMS fabrication technology. Measurement method of pull-press and shearing strength of micro bonding area

General Information

Status : Definitive
Standard Type: Main
Document No: BS EN 62047-25:2016
Document Year: 2016
Pages: 28
  • Section Volume:
  • GBM21 Electronic Components & Devices (GMB21)

Life Cycle

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Definitive
BS EN 62047-25:2016
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