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IEC 62047-34:2019

Semiconductor devices - Micro-electromechanical devices - Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on wafer

Standard Details

IEC 62047-34:2019 (E) describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices. This document applies to test for both open and closed loop piezoresistive MEMS pressure devices on wafer.

General Information

Status : ACTIVE
Standard Type: Main
Document No: IEC 62047-34:2019
Document Year: 2019
Pages: 16
Edition: 1.0

Life Cycle

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ACTIVE
IEC 62047-34:2019
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