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IEC 62047-3:2006 (EN-FR)

Semiconductor devices - Micro-electromechanical devices - Part 3: Thin film standard test piece for tensile testing

Standard Details

Specifies a standard test piece, which is used to guarantee the propriety and accuracy of a tensile testing system for thin film materials with length and width under 1 mm and thickness under 10 m, which are main structural materials for microelectromechanical systems (MEMS), micromachines and similar devices. It is based on such a concept that a tensile testing system can be guaranteed in propriety and accuracy, when the measured tensile strengths of the standard test pieces, whose tensile strength is pre-determined, are within the designated range. It also specifies the test pieces to minimize characteristics deviation among the pieces.

General Information

Status : ACTIVE
Standard Type: Main
Document No: IEC 62047-3:2006 (EN-FR)
Document Year: 2006
Pages: 15
Edition: 1.0

Life Cycle

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ACTIVE
IEC 62047-3:2006 (EN-FR)
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