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IEC 62047-21:2014 (EN-FR)

Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials

Standard Details

IEC 62047-21:2014 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 µm.

General Information

Status : ACTIVE
Standard Type: Main
Document No: IEC 62047-21:2014 (EN-FR)
Document Year: 2014
Pages: 26
Edition: 1.0

Life Cycle

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ACTIVE
IEC 62047-21:2014 (EN-FR)
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