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IEC 62047-1:2016 (EN-FR)

Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions

Standard Details

IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices. This edition includes the following significant technical changes with respect to the previous edition:
a) removal of ten terms;
b) revision of twelve terms;
c) addition of sixteen new terms.

General Information

Status : ACTIVE
Standard Type: Main
Document No: IEC 62047-1:2016 (EN-FR)
Document Year: 2016
Pages: 66
Edition: 2.0

Life Cycle

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ACTIVE
IEC 62047-1:2016 (EN-FR)
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