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BS EN 62047-17:2015

Semiconductor devices. Micro-electromechanical devices - Bulge test method for measuring mechanical properties of thin films

General Information

Status : Definitive
Standard Type: Main
Document No: BS EN 62047-17:2015
Document Year: 2015
Pages: 34
  • Section Volume:
  • GBM21 Electronic Components & Devices (GMB21)

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Definitive
BS EN 62047-17:2015
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