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BS EN 62047-13:2012

Semiconductor devices. Micro-electromechanical devices - Bend-and shear-type test methods of measuring adhesive strength for MEMS structures

General Information

Status : Definitive
Standard Type: Main
Document No: BS EN 62047-13:2012
Document Year: 2012
Pages: 18
  • Section Volume:
  • GBM21 Electronic Components & Devices (GMB21)

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Definitive
BS EN 62047-13:2012
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