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IEC 60204-33:2009 (EN-FR)

Safety of machinery - Electrical equipment of machines - Part 33: Requirements for semiconductor fabrication equipment

Standard Details

IEC 60204-33:2009 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors. It is applicable to the electrical equipment or parts of the electrical equipment that operate with nominal supply voltages not exceeding 1 000 V for alternating current (a.c.) and not exceeding 1 500 V for direct current (d.c.), and with nominal supply frequencies not exceeding 200 Hz. For higher voltages or frequencies, special requirements IEC 60204 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors.

General Information

Status : ACTIVE
Standard Type: Main
Document No: IEC 60204-33:2009 (EN-FR)
Document Year: 2009
Pages: 247
Edition: 1.0
  • Section Volume:
  • TC 44 Safety of machinery - Electrotechnical aspects
  • ICS:
  • 13.110 Safety of machinery
  • 25.040.30 Industrial robots. Manipulators
  • 29.020 Electrical engineering in general

Life Cycle

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IEC 60204-33:2009 (EN-FR)
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