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IEC TS 62622:2012

Nanotechnologies - Description, measurement and dimensional quality parameters of artificial gratings

Standard Details

IEC/TS 62622:2012(E), which is a technical specification, specifies the generic terminology for the global and local quality parameters of artificial gratings, interpreted in terms of deviations from nominal positions of grating features, and provides guidance on the categorization of measurement and evaluation methods for their determination. This specification is intended to facilitate communication among manufacturers, users and calibration laboratories dealing with the characterization of the dimensional quality parameters of artificial gratings used in nanotechnology. This specification supports quality assurance in the production and use of artificial gratings in different areas of application in nanotechnology. Whilst the definitions and described methods are universal to a large variety of different gratings, the focus is on one-dimensional (1D) and two-dimensional (2D) gratings.

General Information

Status : ACTIVE
Standard Type: Main
Document No: IEC TS 62622:2012
Document Year: 2012
Pages: 40
Edition: 1.0
  • Section Volume:
  • TC 113 Nanotechnology for electrotechnical products and systems

Life Cycle

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IEC TS 62622:2012
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