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IEC/IEEE 62659:2015

Nanomanufacturing - Large scale manufacturing for nanoelectronics

Standard Details

IEC/IEEE 62659:2015(E) provides a framework for introducing nanoelectronics into large scale, high volume production in semiconductor manufacturing facilities through the incorporation of nanomaterials (e.g. carbon nanotubes, graphene, quantum dots, etc.). Since semiconductor manufacturing facilities need to incorporate practices that maintain high yields, there are very strict requirements for how manufacturing is performed. Nanomaterials represent a potential contaminant in semiconductor manufacturing facilities and need to be introduced in a structured and methodical way.

General Information

Status : ACTIVE
Standard Type: Main
Document No: IEC/IEEE 62659:2015
Document Year: 2015
Pages: 12
Edition: 1.0
  • Section Volume:
  • TC 113 Nanotechnology for electrotechnical products and systems
  • ICS:
  • 07.030 Physics. Chemistry
  • 07.120 Nanotechnologies
  • 25.020 Manufacturing forming processes

Life Cycle

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IEC/IEEE 62659:2015
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