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ISO 16700:2016

Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification

Standard Details

ISO 16700:2016 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. It does not apply to the dedicated critical dimension measurement SEM.

General Information

Status : Published
Standard Type: Main
Document No: ISO 16700:2016
Document Year: 2016
Pages: 18
Edition: 2

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ISO 16700:2016
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