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ISO 25178-603:2013

Geometrical product specifications (GPS) — Surface texture: Areal — Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments

Standard Details

ISO 25178-603:2013 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.

General Information

Status : WITHDRAWN
Standard Type: Main
Document No: ISO 25178-603:2013
Document Year: 2013
Pages: 28
Edition: 1
  • Section Volume:
  • ISO/TC 213. Dimensional and geometrical product specifications and verification

Life Cycle

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WITHDRAWN
ISO 25178-603:2013
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