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Geometrical product specifications (GPS) — Surface texture: Areal — Part 602: Design and characteristics of non-contact (confocal chromatic probe) instruments
This document specifies the design and metrological characteristics of a particular non-contact instrument for measuring surface texture using a confocal chromatic probe based on axial chromatic aberration of white light. Additional metrological characteristics can be found in ISO 25178-600. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements.
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