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ISO 22278:2020

Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam

Standard Details

This document specifies the test method for measuring the crystalline quality of single-crystal thin film (wafer) using the XRD method with parallel X-ray beam. This document is applicable to all of the single-crystal thin film (wafer) as bulk or epitaxial layer structure.

General Information

Status : Published
Standard Type: Main
Document No: ISO 22278:2020
Document Year: 2020
Pages: 29
Edition: 1

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ISO 22278:2020
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