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ISO 23131:2021

Ellipsometry — Principles

Standard Details

This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories.

It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.

General Information

Status : Published
Standard Type: Main
Document No: ISO 23131:2021
Document Year: 2021
Pages: 15
Edition: 1
  • Section Volume:
  • ISO/TC 107. Metallic and other inorganic coatings
  • ICS:
  • 17.020 Metrology and measurement in general

Life Cycle

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ISO 23131:2021
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