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Cleanrooms and associated controlled environments — Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications
The appropriateness of cleaning techniques will make reference to the cleanliness classes and associated test methods found in ISO 14644‑9 and ISO 14644‑10.
The following matters of general guidance will be provided:
- expected surface cleanliness levels;
- suitability of cleaning methods;
- compatibility of surfaces with the cleaning technique;
- assessment of cleaning appropriateness.
The following will be excluded from this document:
- classification of cleaning methods;
- product produced within a cleanroom;
- specific surface-related cleaning methods;
- detailed description of cleaning mechanisms, methods and procedures of various cleaning methods;
- detailed material characteristics;
- description of damage mechanisms by cleaning processes and time-dependent effects;
- references to interactive bonding forces between contaminants and surfaces or generation processes that are usually time-dependent and process-dependent;
- other characteristics of particles such as electrostatic charge, ionic charges, etc.;
- chemical reactions between molecular contaminants and surfaces;
- microbiological aspects of surface cleanliness;
- radioactive aspects of contamination;
- health and safety considerations;
- environmental aspects such as waste disposal, emissions, etc.;
- selection and use of statistical methods.
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