ISO 14644-10:2022

Cleanrooms and associated controlled environments — Part 10: Assessment of surface cleanliness for chemical contamination

Standard Details

This document establishes appropriate testing processes to determine the cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). This document is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, worksurfaces, tools, equipment and devices.

NOTE 1 For the purpose of this document, consideration is only given to the chemical characteristics of a particle. The physical properties of the particle are not considered and this document does not cover the interaction between the contamination and the surface.

NOTE 2 This document does not include the contamination generation process or any time-dependent influences (e.g. deposition, sedimentation, ageing) or process-dependent activities such as transportation and handling. Neither does it include guidance on statistical quality-control techniques to ensure compliance.

General Information

Status : Published

Standard Type: Main

Document No: ISO 14644-10:2022

Document Year: 2022

Pages: 31

Edition: 2

Section Volume:
ISO/TC 209. Cleanrooms and associated controlled environments

ICS:
13.040.35 Cleanrooms and associated controlled environments

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ISO 14644-10:2022

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