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ISO 23216:2021

Carbon based films — Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry

Standard Details

This document specifies spectroscopic ellipsometry for the determination of optical properties (refractive index n and extinction coefficient k) and the optical classification of different types of amorphous carbon films within the n-k plane.

It is applicable to amorphous carbon films deposited by ionized evaporation, sputtering, arc deposition, plasma-assisted chemical vapour deposition, hot filament techniques and others.

It does not apply to carbon films modified with metals or silicon, amorphous carbon films that have a gradient of composition/property in the thickness, paints and varnishes.

General Information

Status : Published
Standard Type: Main
Document No: ISO 23216:2021
Document Year: 2021
Pages: 7
Edition: 1
  • Section Volume:
  • ISO/TC 107. Metallic and other inorganic coatings

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ISO 23216:2021
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