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16/30348371 DC

BS ISO 14644-12. Cleanrooms and associated controlled environments. Part 12. Specifications for monitoring air cleanliness by nanoscale particle concentration

General Information

Status : Definitive
Standard Type: Main
Document No: 16/30348371 DC
Document Year: 31
Pages: 21
  • Section Volume:
  • GBM06 Environment & Waste (GMB06)
  • ICS:
  • 13.040.35 Cleanrooms and associated controlled environments

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Definitive
16/30348371 DC
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