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24/30497109 DC

BS EN IEC 63068-5 Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices - Part 5. Test method for defects using X-ray topography

General Information

Status : Definitive
Standard Type: Main
Document No: 24/30497109 DC
Document Year: 12
Pages: 32
  • Section Volume:
  • GBM21 Electronic Components & Devices (GMB21)

Life Cycle

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Definitive
24/30497109 DC
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