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23/30454370 DC

BS EN IEC 62047-46. Semiconductor devices. Micro-electromechanical devices - Part 46. Silicon based MEMS fabrication technology. Measurement method of tensile strength of nanoscale membrane

General Information

Status : Definitive
Standard Type: Main
Document No: 23/30454370 DC
Document Year: 19
Pages: 15
  • Section Volume:
  • GBM21 Electronic Components & Devices (GMB21)

Life Cycle

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Definitive
23/30454370 DC
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