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18/30383935 DC

BS EN IEC 62047-37. Semiconductor devices. Micro-electromechanical devices - Part 37. Environmental test methods of MEMS piezoelectric thin films for sensor application

General Information

Status : Definitive
Standard Type: Main
Document No: 18/30383935 DC
Document Year: 4
Pages: 19
  • Section Volume:
  • GBM21 Electronic Components & Devices (GMB21)

Life Cycle

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Definitive
18/30383935 DC
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